Industries > Semiconductor Industry Applications
Semiconductor Industry Applications
We offer motion control solutions to meet the unique needs of the semiconductor industry. The meticulous precision and reliable performance of our motors are suitable for a variety of applications and can keep your equipment running flawlessly. Choose the product that best suits your specific application to achieve optimal performance.
Why leading semiconductor manufacturers choose our motors:
- Superior torque density in a compact footprint
- Precision control for accurate positioning or variable speed
- Multi-axis synchronous motion where required
- A wide variety of linear and rotary actuators, depending on the application needs
Product Selection by Application
Wafer Pin Lifter
Lifting and lowering silicon wafers require precise and smooth motion in a compact design.
Wafer Handling Machine
Handling wafer presents unique challenges like moving high inertial loads precisely and delicately.
Chemical Mechanical Polishing (CMP)
Precise control of the swing arm position and polishing pad speed are critical for polishing wafers.
Wafer Loading / Unloading
Wafer handling requires extreme accuracy and delicate movements while closed-loop feedback provides peace of mind.
Spraying / Cleaning Device (Nozzle) Swing Arm
Cleaning tool application requires high torque, precise positioning, and the ability to control torque.
CMP CUP Lifting
Lifting mechanism in semiconductor tool requires high torque and synchronous motion in a small footprint.
Engineering Notes
Download Product Literature
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