Semiconductor Application - Spraying / Cleaning Device (Nozzle) Swing Arm

Cleaning tool application requires high torque, precise positioning, and the ability to control torque. Spraying and cleaning process is the part of the wafer cleaning equipment, which has gradually become the mainstream wet cleaning equipment in semiconductor manufacturing due to its effective process, high uniformity, and low cross contamination. 

Common Requests

• High inertia / load
• Hollow shaft