Semiconductor Application - Wafer Loading / Unloading

Wafer handling requires extreme accuracy and delicate movements while closed-loop feedback provides peace of mind.

This process is a part of the wafer cleaning equipment, which has gradually become the mainstream wet cleaning equipment in semiconductor manufacturing due to its effective process, high uniformity, and low cross-contamination. 

Common Requests

• High inertia / load
• Hollow shaft
• Compact