Industries > Semiconductor > Semiconductor Application - Wafer Pin Lifter
Semiconductor Application - Wafer Pin Lifter
Lifting and lowering silicon wafers require precise and smooth motion in a compact design. Precise handling minimizes tilting of the wafer, causing scratches or other damage to the wafers.
Compact electric cylinders or stepper motors with linear actuator attachment can lift and lower wafers while minimizing footprint.
Common Requests
- Position precisely
- Minimize footprint
- Minimize damage
- Increase reliability
- Synchronized motion
Solutions
Suitable for High-Precision Applications
DR/DRS2 Series Compact Electric Cylinders
- Entire linear motion mechanism in a compact design
- Highly responsive and reliable αSTEP closed-loop technology
- Preassembled for quality and convenience
Suitable for Simple and Cost Effective Needs
Stepper Motor Linear Actuator Attachment
- Linear motion mechanism with a leadscrew and a resin nut
- Saves space and reduces design time compared to a custom-built mechanism
- Self-locking force 100 N (lead 2 mm) capable of load holding
- To use with 2-Phase and 5-Phase stepper motors PKP Series
Suitable for Multi-Axis Open-Loop Stepper Control
CVD Multi-Axis Type EtherCAT Compatible Stepper Motor Drivers
- Compact, lightweight 4-axis control
- Can be used with 2-phase/5-phase stepper motors
- EtherCAT communication enables synchronous operation
Suitable for Multi-Axis Closed-Loop Stepper Control
EtherCAT Compatible Multi-axis Controller
- Minimize footprint for multiple drivers
- EtherCAT compatibility
- Available in 2-axis, 3-axis and 4-axis
Engineering Notes
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Technical Support:
1-800-468-3982
